Beschreibung
Chemical-Mechanical Polishing
Initial 6 month contract + extensions after
Regensburg, Germany
1. Project Name: Documentation and improvements for instable process at CMP
2. Description of Services:
CMP (Chemical Mechanical Polishing) causes instabilities in a new process. These instabilities like residues or topography need to be documented and improvement measures are to be defined, verified and implemented.
3. Deliverables and Results:
a). CMP Cu1/2: i) documentation of deviations using additional measurements, ii) definition, verification and implementation of improvement measures
b). CMP Backside: i) documentation of deviations using additional measurements, ii) definition, verification and implementation of improvement measures